KLOE is an innovative manufacturer of photolithography equipment, founded in Montpellier, France, in 2001. Since its inception, the company has aimed to deliver a technological breakthrough compared to existing systems, relying on deep expertise in optical addressing. The result: high-performance, compact, and intuitive systems designed to meet a wide range of industrial and scientific applications.
With nearly 25 years of experience, KLOE has built a strong reputation in the field of microtechnologies, with nearly to 700 systems installed in over 50 countries. KLOE’s clients operate in various sectors such as photonics, microelectronics, microfluidics, micro-optics, surface structuring, and even space-related applications.
The company relies on a multidisciplinary team of around twenty professionals, combining expertise in optics/photonics, materials science, electronics, mechanics, and computer science. This diversity enables KLOE to be the only manufacturer worldwide offering a full range of photolithography systems, covering mask-based photolithography, maskless direct laser writing, and high-resolution 3D microfabrication through stereolithography.
2. A Complete Range to Cover All Photolithography Needs
KLOE has developed a comprehensive and efficient portfolio of systems designed to provide high resolution, user-friendly interfaces, and versatility.
- UV-KUB Series – Mask-Based Photolithography
Compact and intuitive mask aligners using advanced LED sources with very high collimation (<1.5° divergence) and excellent uniformity exceeding 95%. This enables submicron resolution across 6-inch wafers, thick-layer processing, and vertical sidewalls; all without the need for vacuum contact.
- Dilase Series – Maskless Direct Laser Writing
Designed for fast direct prototyping, Dilase systems combine vector-based writing mode with extended depth of focus to deliver high-resolution patterns (down to 0.5 µm) and superior aspect-ratio structures (>1:30) with smooth sidewalls. A grayscale mode supports over 5,000 levels for complex structuration.
- Dilase 3D – High-Resolution 3D Microfabrication
SLA-based 3D printer delivering micrometric resolution with minimal surface roughness. It allows fast fabrication of large volumes (100×100×50mm), effectively bridging the gap between standard 3D printing and two-photon polymerization technologies. 
3. A New Generation of Equipment for Production Environments
While KLOE systems have traditionally been used in research and prototyping, and even for small-batch production, more and more users are now deploying them in 24/7 continuous production settings.
To meet this growing demand, KLOE is finalizing the development of a new mask aligner for 8-inch wafers (with 9" square masks), specifically designed for advanced production environments and semiconductor industry requirements.
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KLOE shapes the future of microfabrication with innovative photolithography systems, combining precision, versatility, and industrial performance to support research and production worldwide.
Staying true to its DNA, KLOE is designing this new equipment as a disruptive alternative to traditional systems. It integrates a new generation of LED-based light sources, further optimized thanks to decades of experience in optical addressing, providing unmatched light uniformity across large wafer areas while remaining compact and high-performing.
This upcoming aligner also features an innovative and non-invasive contact mechanisms, designed to enable rapid and reliable sample alignment without risking damage to substrates or photomasks. In parallel, KLOE is incorporating advanced automation features, like auto-leveling, automatic alignment, etc. The clear objective: to support clients transitioning to industrial-scale production without compromising on precision or reliability.
Conclusion
For over two decades, KLOE has been pushing the boundaries of photolithography. By combining technological excellence, intuitive user experience, and industrial insight, the company continues to deliver solutions that meet both current and future customer needs. With its upcoming generation of equipment, KLOE confirms its ambition to be a key player in the microfabrication landscape of tomorrow, all over the world.
